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Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices

Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices

Monoj Kumar Singha, Vineet Rojwal
Copyright: © 2020 |Pages: 25
ISBN13: 9781799825845|ISBN10: 1799825841|EISBN13: 9781799825852
DOI: 10.4018/978-1-7998-2584-5.ch011
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MLA

Singha, Monoj Kumar, and Vineet Rojwal. "Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices." Advancements in Instrumentation and Control in Applied System Applications, edited by Srijan Bhattacharya, IGI Global, 2020, pp. 178-202. https://doi.org/10.4018/978-1-7998-2584-5.ch011

APA

Singha, M. K. & Rojwal, V. (2020). Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices. In S. Bhattacharya (Ed.), Advancements in Instrumentation and Control in Applied System Applications (pp. 178-202). IGI Global. https://doi.org/10.4018/978-1-7998-2584-5.ch011

Chicago

Singha, Monoj Kumar, and Vineet Rojwal. "Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices." In Advancements in Instrumentation and Control in Applied System Applications, edited by Srijan Bhattacharya, 178-202. Hershey, PA: IGI Global, 2020. https://doi.org/10.4018/978-1-7998-2584-5.ch011

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Abstract

Thin film is used for sensing and electronic devices applications. Various techniques are used for thin film deposition. This chapter presents the Spray pyrolysis deposition technique used for the growth of thin films sensing and device material. Spray pyrolysis is an inexpensive method to grow good crystalline thin film compared to other thin film deposition techniques. The chapter gives an overview of the spray process used for thin film deposition. Basic setup for this process is explained. Parameters affecting the deposition process is explained, as are the various spray methods. Finally, some examples of spray pyrolysis in different applications like a gas sensor, UV photodetector, solar cell, photocatalysis, and supercapacitor are discussed.

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