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Introduction to MEMS and Microfluidics

Introduction to MEMS and Microfluidics

Rajeev Kumar Singh, Rakesh Kumar Phanden, Adam Jacso, Ankur Gupta
Copyright: © 2023 |Pages: 10
ISBN13: 9781668469521|ISBN10: 1668469529|ISBN13 Softcover: 9781668469538|EISBN13: 9781668469545
DOI: 10.4018/978-1-6684-6952-1.ch001
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MLA

Singh, Rajeev Kumar, et al. "Introduction to MEMS and Microfluidics." Advances in MEMS and Microfluidic Systems, edited by Rajeev Kumar Singh, et al., IGI Global, 2023, pp. 1-10. https://doi.org/10.4018/978-1-6684-6952-1.ch001

APA

Singh, R. K., Phanden, R. K., Jacso, A., & Gupta, A. (2023). Introduction to MEMS and Microfluidics. In R. Singh, R. Phanden, B. Sikarwar, & J. Davim (Eds.), Advances in MEMS and Microfluidic Systems (pp. 1-10). IGI Global. https://doi.org/10.4018/978-1-6684-6952-1.ch001

Chicago

Singh, Rajeev Kumar, et al. "Introduction to MEMS and Microfluidics." In Advances in MEMS and Microfluidic Systems, edited by Rajeev Kumar Singh, et al., 1-10. Hershey, PA: IGI Global, 2023. https://doi.org/10.4018/978-1-6684-6952-1.ch001

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Abstract

Microelectromechanical systems (MEMS) refer to systems with characteristic length ranging between 1 µm and 1 mm, fabricated by integrated circuits batch processing technologies and unite mechanical and electrical components. MEMS devices and systems have wide applications in multifarious medical and industrial applications with worldwide market of billions of dollars. Examples of MEMS devices are accelerometers for automobile airbags; micropumps for inkjet printing, electronic cooling, and environmental testing; infrared detectors, digital light processing chip for projection display, etc. Microfluidics refers to fluid flow at a small size scale that causes change in fluid behavior. Microfluidic devices/systems handle a small quantity (micro- or nanoliter) of fluids (liquid or gas). The major application for handling fluids in microfluidics relates to chemical and biomedical analyses. The benefit of application of microfluidics in chemical and biomedical analysis is that they provide a total solution from sample utilization to display of analytical results.

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